Influence of oxygen gas content on the structural and optical properties of ZnO thin films deposited by RF magnetron sputtering at room temperature

来源期刊：Rare Metals2011年第2期

论文作者：LIU Baoting a,ZHOU Yang a,ZHENG Hongfang b,LI Man a,GUO Zhe a,ZHAO Qingxun a,and PENG Yingcai c a College of Physics Science and Technology,Hebei University,Baoding ,China b Baoding University,Baoding ,China c College of Electronic and Information Engineering,Hebei University,Baoding ,China

文章页码：170 - 174

摘    要：Zinc oxide （ZnO） thin films were deposited on sapphire （0001） substrates at room temperature by radiofrequency （RF） magnetron sputtering at oxygen gas contents of 0%,25%,50% and 75%,respectively.The influence of oxygen gas content on the structural and optical properties of ZnO thin films was studied by a surface profile measuring system,X-ray diffraction analysis,atomic force microscopy,and UV spectrophotometry.It is found that the size of ZnO crystalline grains increases first and then decreases with the increase of oxygen gas content,and the maximum grain size locates at the 25% oxygen gas content.The crystalline quality and average optical transmittance （>90%） in the visible-light region of the ZnO film prepared at an oxygen gas content of 25% are better than those of ZnO films at the other contents.The obtained results can be attributed to the resputtering by energetic oxygen anions in the growing process.