钨掺杂氧化锌薄膜的结构与光学性能的研究

来源期刊：有色金属科学与工程2011年第5期

论文作者：许亮 洪瑞金 温和瑞

文章页码：32 - 35

关键词：钨掺杂；氧化锌薄膜；溶胶-凝胶法；光致发光

Key words：w-doping ; ZnO thin films ; sol-gel; photoluminescence

摘    要：实验采用溶胶-凝胶法在石英玻璃衬底上制备了掺杂不同钨离子浓度氧化锌薄膜研究了钨离子的浓度变化对氧化锌薄膜结构与光学性能的影响测试结果表明，钨离子的掺入使氧化锌薄膜的晶体质量得到提高，衍射峰位置向低衍射角度方向移动，导致薄膜的光学带边发生收缩，即产生“红移”现象随着钨离子浓度增加，氧化锌薄膜光致发光强度表现为先增加而后出现浓度淬灭现象。

Abstract:

Undoped and W-doped zinc oxide thin films were prepared on quartz substrates by sol-gel process. The effects of tungsten doping on the structure and optical properties of ZnO thin films were investigated. The results suggested that the crystalline quality of ZnO thin films was improved with the doping of tungsten and the peak position was shifted to the lower diffraction angles. The optical band edge of W-doped films showed a red-shift with the increasing in tungsten doping. Moreover, near band edge emission gradually increased with increase in W content (up to about 0.5 wt%), and then abruptly decreased due to the concentration quenching effect.