Structural, Mechanical Properties and Thermal Stability of ZrAlN Coatings
来源期刊：材料保护2004年增刊第2期
论文作者：WANG M X ZHANG J J LID J
关键词：ZrAlN coating; magnetron sputtering; thermal stability;
摘 要：Dry machining will result in elevated temperatures at the tool surface ( 800 ～ 1000 ℃ ). So, coating materials that can provide protection for cutting tools at these temperatures are of great technological interests. ZrAlN coating is proposed to possess high-temperature stable structural and mechanical properties due to the addition of the alloying element.ZrAlN coatings were grown using a dc reactive magnetron sputtering. The XRD and ultramicro-indentor were employed to investigate the effects of reaction gas partial pressure and substrate bias on structural, mechanical properties, as well as hightemperature stability. The ZrAlN coating, when deposited under optimum conditions ( -37 V substrate bias and 1.5 10-7 Torr N2 partial pressure), showed smooth surface with 22 GPa hardness and 2.2 GPa internal stress. Its structural and mechanical properties kept high-temperature stability before and after annealing .
WANG M X1，ZHANG J J1，LID J1
(1.College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin 300074)
摘要:Dry machining will result in elevated temperatures at the tool surface ( 800 ～ 1000 ℃ ). So, coating materials that can provide protection for cutting tools at these temperatures are of great technological interests. ZrAlN coating is proposed to possess high-temperature stable structural and mechanical properties due to the addition of the alloying element.ZrAlN coatings were grown using a dc reactive magnetron sputtering. The XRD and ultramicro-indentor were employed to investigate the effects of reaction gas partial pressure and substrate bias on structural, mechanical properties, as well as hightemperature stability. The ZrAlN coating, when deposited under optimum conditions ( -37 V substrate bias and 1.5 10-7 Torr N2 partial pressure), showed smooth surface with 22 GPa hardness and 2.2 GPa internal stress. Its structural and mechanical properties kept high-temperature stability before and after annealing .
关键词:ZrAlN coating; magnetron sputtering; thermal stability;
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