Investigation on the magnetomechanical behavior of trilayered GM actuator
来源期刊：JOURNAL OF RARE EARTHS2008年第2期
论文作者：Heung-Shik Lee Chongdu Cho
Key words：GM actuator; magnetostriction; trilayered film; magnetron sputtering; magnetization; rare earths;
Abstract: In this article, it was suggested a TbFe/Co/Dy trilayered GM (Giant Magnetostrictive) film type actuator and investigated the magnetomechanical characteristics of the actuator for micro application. The trilayered films were fabricated at different thickness ratios to get an optimized structure. TbFe had positive GM properties, and cobalt, dysprosium layers made the magnetostriction property of composite film increase in low magnetic field. To fabricate the Si based microactuator with trilayered film, micromachining processes including RIE (Reactive Ion Etching) and selective DC magnetron sputtering techniques were combined. The deposited film thicknesses were measured by X-ray diffraction (XRD). As a result, the magnetization of the film on the fabricated actuator was observed to characterize the magnetic properties of the TbFe/Co/Dy film using VSM (Vibrating Sample Magnetometer). The magnetostriction of the actuator was determined by measuring the differences of curvature of the film coated silicon substrates using the optical cantilever method, and the deflections were also estimated under the external magnetic field lower than 0.5T for micro-system applications.
Heung-Shik Lee1，Chongdu Cho1
(1.Department of Mechanical Engineering, Inha University, Yonghyun-dong, Nam-ku Incheon 402-751, South Korea)
Abstract:In this article, it was suggested a TbFe/Co/Dy trilayered GM (Giant Magnetostrictive) film type actuator and investigated the magnetomechanical characteristics of the actuator for micro application. The trilayered films were fabricated at different thickness ratios to get an optimized structure. TbFe had positive GM properties, and cobalt, dysprosium layers made the magnetostriction property of composite film increase in low magnetic field. To fabricate the Si based microactuator with trilayered film, micromachining processes including RIE (Reactive Ion Etching) and selective DC magnetron sputtering techniques were combined. The deposited film thicknesses were measured by X-ray diffraction (XRD). As a result, the magnetization of the film on the fabricated actuator was observed to characterize the magnetic properties of the TbFe/Co/Dy film using VSM (Vibrating Sample Magnetometer). The magnetostriction of the actuator was determined by measuring the differences of curvature of the film coated silicon substrates using the optical cantilever method, and the deflections were also estimated under the external magnetic field lower than 0.5T for micro-system applications.
Key words:GM actuator; magnetostriction; trilayered film; magnetron sputtering; magnetization; rare earths;
【全文内容正在添加中】
