Preparation of H-terminated and aminated diamond like carbon surfaces
来源期刊:Rare Metals2012年第2期
论文作者:WANG Mei, WANG Weichen, HUANG Yujie, and LI Musen Key Laboratory of Liquid Structure and Heredity of Materials, Ministry of Education, Shandong University, Jinan, , China
文章页码:189 - 192
摘 要:H-terminated DLC layers were synthesized on SiO 2 substrate by radio frequency (RF) magnetron plasma-enhanced chemical vapor deposition (PECVD) in a conventional reactor using C 4 H 10 as carbon source. As-deposited DLC films were characterized by Raman spectroscopy, scanning electron microscopy (SEM) as well as atomic force microscopy (AFM). The chemical reactivity of the obtained DLC surface was further investigated by exposing the photochemically oxidized DLC surface to a silane reagent. The course of the reaction was followed using water contact angle and X-ray photoelectron spectroscopy.
WANG Mei, WANG Weichen, HUANG Yujie, and LI Musen Key Laboratory of Liquid Structure and Heredity of Materials, Ministry of Education, Shandong University, Jinan, 250061, China
摘 要:H-terminated DLC layers were synthesized on SiO 2 substrate by radio frequency (RF) magnetron plasma-enhanced chemical vapor deposition (PECVD) in a conventional reactor using C 4 H 10 as carbon source. As-deposited DLC films were characterized by Raman spectroscopy, scanning electron microscopy (SEM) as well as atomic force microscopy (AFM). The chemical reactivity of the obtained DLC surface was further investigated by exposing the photochemically oxidized DLC surface to a silane reagent. The course of the reaction was followed using water contact angle and X-ray photoelectron spectroscopy.
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