Preparation and characterization of microcrack-free thick YBa2Cu3O7-δ films
来源期刊：Rare Metals2007年第5期
论文作者：XIONG Jie,QIN Wenfeng,TANG Jinlong,TAO Bowan,CUI Xumei,and LI Yanrong State Key Lab of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu ,China
文章页码：403 - 407
摘 要：High quality epitaxial YBa2Cu3O7-δ （YBCO） superconducting films were fabricated on （00l） LaAlO3 substrates using the direct-current sputtering method. The attainment of an unusually high film thickness （up to 2.0 μm） without mi-crocracking was attributed in part to the presence of pores correlated with yttrium-rich composition in the films. The influ-ence of the film thickness on the microstructure was investigated by X-ray diffraction conventional scan （θ-2θ,ω-scan,pole figure） and high-resolution reciprocal space mapping. The films were c-axis oriented with no a-axis-oriented grains up to the thickness of 2 μm. The surface morphology and the critical current density （Jc） strongly depended on the film thickness. Furthermore,the reasons for these thickness dependences were elucidated in detail.
摘要：High quality epitaxial YBa2Cu3O7-δ （YBCO） superconducting films were fabricated on （00l） LaAlO3 substrates using the direct-current sputtering method. The attainment of an unusually high film thickness （up to 2.0 μm） without mi-crocracking was attributed in part to the presence of pores correlated with yttrium-rich composition in the films. The influ-ence of the film thickness on the microstructure was investigated by X-ray diffraction conventional scan （θ-2θ,ω-scan,pole figure） and high-resolution reciprocal space mapping. The films were c-axis oriented with no a-axis-oriented grains up to the thickness of 2 μm. The surface morphology and the critical current density （Jc） strongly depended on the film thickness. Furthermore,the reasons for these thickness dependences were elucidated in detail.
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