SILICON NITRIDE POWDER SYNTHESIZED BY THERMAL PLASMA METHOD
来源期刊：中国有色金属学报(英文版)1996年第3期
论文作者：Liang Shuquan Huang Baiyun Zheng Ziqiao Szepvolgyi J
文章页码：103 - 107
Key words：Si3N4; nanosized powder; thermal plasma method
Abstract: Nanosized amorphous Si3N4powders were prepared from the reaction between SiCl4 and NH3 in a RF plasma torch with a specific geometry. The experiments are aimed at studying the relationships between synthesis parameters and nitrogen content of the product, mass distributions of the product and the byproduct. The main experimental parameters included plasma power, the mole ratio of the reactants. The powder was characterized in terms of the chemical composition analysis and morphology observation. The crystallization behaviors were also investigated.
