A Study on Medium Temperature Chemical Vapor Deposition (MT-CVD) Technology and Super Coating Materials
来源期刊：材料保护2004年增刊第2期
论文作者：LI Jian-ping ZENG Xiang-cai MA Wen-cun GAO Jian
关键词：MT-CVD; HT-CVD; TiCN; super coating layers;
摘 要：In this paper, the dense and columnar crystalline TiCN coating layers with very good bonding strength between a layer and another layer was deposited using Medium Temperature Chemical Vapor Deposition (MT-CVD) where CH3CN organic composite with C/N atomic clusters etc. was utilized at 700 ～ 900 ℃. Effect of coating processing parameters, such as coating temperature, pressure and different gas flow quantity on structures and properties of TiCN coating layers were investigated. The super coating mechanis mand structures were analyzed. The new coating processing parameters and properties of carbide inserts with super coating layers were gained by using the improved high temperature chemical vapor deposition (HTCVD) equipment and HT-CVD, in combination with MT-CVD technology.
LI Jian-ping1，ZENG Xiang-cai1，MA Wen-cun1，GAO Jian1
(1.Chengdu Tool Institute, Chengdu 610051)
摘要:In this paper, the dense and columnar crystalline TiCN coating layers with very good bonding strength between a layer and another layer was deposited using Medium Temperature Chemical Vapor Deposition (MT-CVD) where CH3CN organic composite with C/N atomic clusters etc. was utilized at 700 ～ 900 ℃. Effect of coating processing parameters, such as coating temperature, pressure and different gas flow quantity on structures and properties of TiCN coating layers were investigated. The super coating mechanis mand structures were analyzed. The new coating processing parameters and properties of carbide inserts with super coating layers were gained by using the improved high temperature chemical vapor deposition (HTCVD) equipment and HT-CVD, in combination with MT-CVD technology.
关键词:MT-CVD; HT-CVD; TiCN; super coating layers;
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