Robust ultrathin and transparent AZO/Ag-SnO_x/AZO on polyimide substrate for flexible thin film heater with temperature over 400℃

Zhaozhao Wang^1,2，Jia Li¹，Junjun Xu^1,2，Jinhua Huang²，Ye Yang²，Ruiqin Tan³，Guofei Chen²，Xingzhong Fang²，Yue Zhao¹，Weijie Song^2,4

1. School of Materials Science and Engineering, Shanghai University2. Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences3. Faculty of Information and Computer Science, Ningbo University4. Jiangsu Collaborative Innovation Center of Photovoltaic Science and Engineering

摘 要：We developed flexible and transparent thin film heaters（TFHs） with a structure of AZO/AgSnO_x/AZO/polyimide（PI） which exhibited superior stability under operational conditions.Ultrathin and robust doped silver（Ag） films were produced by introducing a small amount of SnO_x during the sputtering process.The AZO/Ag-SnO_x/AZO stacks showed the best figure of merit value of 139.9,which was higher than that of ITO counterpart（25.5） with the same thickness.In addition,it exhibited excellent durability,which showed unaffected optical and electrical properties under the heat treatment of 500℃ for 30 min in air,highly-accelerated tempe ratu re and humidity stress test（HAST） at 121℃ and 97% RH for 36 h,10,000 times of scratching and 1500 times of inner and outer bending test.Furthermore,the TFHs based on AZO/Ag-SnO_x/AZO/PI achieved a high temperature of 438.8℃ with response time in several seconds,which outperformed most previous studies.The robust high-temperature TFHs in this research hold promising commercial applications in flexible and high temperature occasions.

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