Application of Magnetron Sputtering in Fabricating MEMS Microbatteries
来源期刊：材料保护2004年增刊第2期
论文作者：SHEN Wan YANG Zhi-min DU Jun MAO Chang-hui XING Guang-jian
关键词：microbattery; magnetron sputtering; MEMS; thin film;
摘 要：With the development of MEMS and the electronic devices's miniaturization and integration, a new kind of power sources that can satisfy the need for high energy density is required. Microbatteries are being researched abroad for their advantages of extreme thinness and long-term power supply. The development of MEMS microbatteries are reviewed and suggestedmagnetron sputtering in fabricating a high-performance microbattery. The technics as annealing are analyzed. The microbattery with a LiNi1-x Cox O2 cathode exhibited stable cycle ability and a high specific discharge capacity, which was attributed to the alloying effect of the LiNiO2and LiCoO2.
SHEN Wan1，YANG Zhi-min1，DU Jun1，MAO Chang-hui1，XING Guang-jian1
(1.Research Center of Energy Materials & Technology, General Research Institute for Nonferrous Metals, Beijing 100088,P. R. China)
摘要:With the development of MEMS and the electronic devices''s miniaturization and integration, a new kind of power sources that can satisfy the need for high energy density is required. Microbatteries are being researched abroad for their advantages of extreme thinness and long-term power supply. The development of MEMS microbatteries are reviewed and suggestedmagnetron sputtering in fabricating a high-performance microbattery. The technics as annealing are analyzed. The microbattery with a LiNi1-x Cox O2 cathode exhibited stable cycle ability and a high specific discharge capacity, which was attributed to the alloying effect of the LiNiO2and LiCoO2.
关键词:microbattery; magnetron sputtering; MEMS; thin film;
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