Preparation and characterization of La0.9Sr0.1Ga0.8Mg0.2O3-δ thin film deposited by radio frequency magnetic sputtering
来源期刊：Journal of Rare Earths2013年第6期
论文作者：阳建君 马文会 于洁 陈秀华 邢洁 李 蕊
文章页码：582 - 588
摘 要：La0.9Sr0.1Ga0.8Mg0.2O3-δ （LSGM） electrolyte materials were synthesized by the solid state reaction method.The conductivity of LSGM materials was detected by four probe method,and it was 0.08 S/cm at 850 ℃.Dense and uniform films of LSGM materials were deposited by the magnetic sputtering on substrates of Si and La0.7Sr0.3Cr0.5Mn0.5O3-δ （LSCM）.The experimental results showed that the deposition rates dropped and the average grain sizes of the films enlarged with increase in the substrate temperatures.In the sputtering process,the LSGM film was deposited with preferred growth direction.After annealing,the preferred growth direction disappeared and the film surface became smoother and denser.Through observing the deposition process,deposition mechanism was proposed,which was consistent with a model of island growth.
阳建君1,2，马文会1,2，于洁1,3，陈秀华4，邢洁1,4，李 蕊1,4
1. National Engineering Laboratory for Vacuum Metallurgy2. Faculty of Metallurgical and Energy Engineering,Kunming University of Science and Technology3. Faculty of Environment Science and Engineering,Kunming University of Science and Technology4. Faculty of Physical Science and Technology,Yunnan University
摘 要：La0.9Sr0.1Ga0.8Mg0.2O3-δ （LSGM） electrolyte materials were synthesized by the solid state reaction method.The conductivity of LSGM materials was detected by four probe method,and it was 0.08 S/cm at 850 ℃.Dense and uniform films of LSGM materials were deposited by the magnetic sputtering on substrates of Si and La0.7Sr0.3Cr0.5Mn0.5O3-δ （LSCM）.The experimental results showed that the deposition rates dropped and the average grain sizes of the films enlarged with increase in the substrate temperatures.In the sputtering process,the LSGM film was deposited with preferred growth direction.After annealing,the preferred growth direction disappeared and the film surface became smoother and denser.Through observing the deposition process,deposition mechanism was proposed,which was consistent with a model of island growth.
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