GIANT MAGNETO-IMPEDANCE OF PATTERNED FeSiB/Cu/FeSiB TRI-LAYER FILMS
来源期刊：Acta Metallurgica Sinica2003年第5期
论文作者：M.S.Wu Y.Zhou B.C.Cai X.H.Mao
Key words：giant magneto-impedance effect; FeSiB/Cu/FeSiB films; trilayer films;
Abstract: Sensitive magnetic field sensor with good performances can be fabricated utilizing the giant magneto-impedance (GMI) effect of soft magnetic multi-layer thin films. The transverse and longitudinal GMI effect in patterned FeSiB/Cu/FeSiB tri-layer films with the change of external magnetic field and frequency were studied at the same time. The change of the impedance of the films with the external magnetic fieldand frequency was shown. Comparing the longitudinal and transverse effect, the transverse effect has a larger linear range from zero magnetic field to a quite large magnetic field at all frequencies, and the change still were not saturated until the external magnetic field reached 1.2×104A/m, which illustrated that the films can be utilized to detect larger magnetic fields than now presented GMI sensors.
M.S.Wu1，Y.Zhou1，B.C.Cai1，X.H.Mao1
(1.Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Research Institute of Micro/Nanometer Science and Technology, Shanghai Jiaotong University, Shanghai 200030, China)
Abstract:Sensitive magnetic field sensor with good performances can be fabricated utilizing the giant magneto-impedance (GMI) effect of soft magnetic multi-layer thin films. The transverse and longitudinal GMI effect in patterned FeSiB/Cu/FeSiB tri-layer films with the change of external magnetic field and frequency were studied at the same time. The change of the impedance of the films with the external magnetic fieldand frequency was shown. Comparing the longitudinal and transverse effect, the transverse effect has a larger linear range from zero magnetic field to a quite large magnetic field at all frequencies, and the change still were not saturated until the external magnetic field reached 1.2×104A/m, which illustrated that the films can be utilized to detect larger magnetic fields than now presented GMI sensors.
Key words:giant magneto-impedance effect; FeSiB/Cu/FeSiB films; trilayer films;
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