Preparation and Anti-Oxidation Properties of Ti(CN) Films Deposited by P CVD
来源期刊：材料热处理学报2004年第5期
论文作者：PAN Ying-jun CHEN Shu-hua WU Xin-jie ZHANG Xi-ju LI Ping-sheng
关键词：PCVD; Ti(CN) film; Oxidation;
摘 要：Using metallo-organatic compound TPT as the source of Ti, H13 mould steels were coated with Ti(CN) films by plasma-assisted chemical vapor deposition (PCVD) and the properties of Ti(CN) films were studied. Under the appropriate temperature and pressure, Ti(CN) films on H13 mould steel surfaces had the highest micro-hardness of HV1760 at 500℃,and the films showed excellent anti-oxidation property below 500℃. The lifetime of Ti(CN)-coated augers and dies could be enhanced 7 and 4 times longer than those of untreated respectively.
PAN Ying-jun1，CHEN Shu-hua1，WU Xin-jie1，ZHANG Xi-ju1，LI Ping-sheng1
(1.Department of Material and Metallurgy, Wuhan University of Science and Technology, Wuhan, China)
摘要:Using metallo-organatic compound TPT as the source of Ti, H13 mould steels were coated with Ti(CN) films by plasma-assisted chemical vapor deposition (PCVD) and the properties of Ti(CN) films were studied. Under the appropriate temperature and pressure, Ti(CN) films on H13 mould steel surfaces had the highest micro-hardness of HV1760 at 500℃,and the films showed excellent anti-oxidation property below 500℃. The lifetime of Ti(CN)-coated augers and dies could be enhanced 7 and 4 times longer than those of untreated respectively.
关键词:PCVD; Ti(CN) film; Oxidation;
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