Research on fabricating technique of Ba-Al-S:Eu sputtering target
来源期刊：Journal of Rare Earths2009年第3期
论文作者：丁曌 喻志农 张东璞 薛唯 王武育
文章页码：398 - 401
摘 要：Ba-Al-S-Eu sputtering target for blue emitting phosphors was prepared by powder sintering method. XRD patterns showed that the main components of the target were barium tetra aluminum sulfide（BaAl4S7） ,bariutm sulfide（BaS） ,and europium sulfide（EuS） . In the samples,part of the barium and aluminum are formed into barium aluminum oxide（BaAl2O4） with the impurity element of oxygen. The PL characteristic spectra of the target showed the 470 nm blue emission obviously,and the Ba-Al-S thin films also transmitted a purple-blue emission at the position of 440 nm.The results indicated that this method was suitable for the fabrication of the Ba-Al-S:Eu sputtering target.
丁曌1，喻志农1，张东璞1，薛唯1，王武育2
1. Department of Optical Engineering,School of Information Science and Technology,Beijing Institute of Technology2. Department of Mineral & Metallurgical Materials,General Research Institute for Non-Ferrous Metals
摘 要：Ba-Al-S-Eu sputtering target for blue emitting phosphors was prepared by powder sintering method. XRD patterns showed that the main components of the target were barium tetra aluminum sulfide（BaAl4S7） ,bariutm sulfide（BaS） ,and europium sulfide（EuS） . In the samples,part of the barium and aluminum are formed into barium aluminum oxide（BaAl2O4） with the impurity element of oxygen. The PL characteristic spectra of the target showed the 470 nm blue emission obviously,and the Ba-Al-S thin films also transmitted a purple-blue emission at the position of 440 nm.The results indicated that this method was suitable for the fabrication of the Ba-Al-S:Eu sputtering target.
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