Cu-Al-Mg合金表面氧化膜分析
来源期刊：中国有色金属学报2000年第3期
论文作者：潘奇汉
文章页码：374 - 377
关键词：Cu-Al-Mg合金； 表面分析； 二次电子发射材料
Key words：Cu-Al-Mg alloy; surface analysis; secondary electron emission material
摘 要：利用俄歇能谱、 X射线电子能谱和扫描电镜对Cu-Al-Mg合金表面氧化膜进行了分析。结果表明： 氧化膜由MgO和Al2O3组成；没有进行过氧化处理的样品膜内的Al和O含量高于进行过氧化处理的样品，而Mg则相反； Al2O3的键合能E2p3/2值大于MgO的E2p3/2值，表明Al2O3不易被分解；进行电子轰击后，膜内Mg含量减少， MgO被部分分解，而Al则增加。 由MgO和Al2O3组成的复合型氧化膜使得合金既具有高的二次电子发射系数又有长的寿命，因此，Cu-Al-Mg合金是一种理想的二次电子发射材料。
Abstract: In order to clarify the mechanism of the secondary electron emission, the Cu-Al-Mg alloy surface was analyzed by Auger emission spectroscopy (AES), X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). AES analysis proved that the oxide film of mixed MgO and Al2O3 are deposited on the alloy surface. XPS proved that the bonding energy (E2p3/2) of Al is larger than that of Mg, which indicates that the bond strength of Al2O3 is stronger than that of MgO. SEM observation of the component change of oxide film after electron bombardment showed that MgO is partially decomposed. Therefore the mixed MgO and Al2O3 oxide film, deposited on the surface of Cu-Al-Mg alloy, is better than single oxide film in its structure, which presents better emission property for secondary electron. Al is considered as the critical factor for increasing Cu-Al-Mg alloy emission life.
