YIG Thin Film for RF Integrated Inductor
来源期刊：Journal Of Wuhan University Of Technology Materials Science Edition2017年第3期
论文作者：刘锋 叶双莉
文章页码：557 - 561
摘 要：The yttrium iron garnet（YIG） thin films prepared by the sol-gel method and rapid thermal annealing（RTA） process for integrated inductor are investigated. The X-ray diffraction（XRD） results indicate that the YIG film annealed above 650 ℃ is poly-crystalline with single-phase garnet structure. Moreover, it can be found that the initial permeability μi, saturation magnetization MS and coercivity Hc of these YIG films increase with increasing RTA temperature. Low temperature annealing after crystallization can further improve the magnetic properties of YIG film. Thereby, a planar integrated inductor in the presence of Si substrate/SiO2 layer/Y2.8Bi0.2Fe5O12 thin film/Cu spiral coil structure is fabricated successfully by the standard IC processes. Due to the magnetic enhancement originated from YIG film, the inductance L and quality factor Q of the inductor with YIG film are improved in a certain frequency range.
刘锋，叶双莉
School of Power and Mechanical Engineering, Wuhan University
摘 要：The yttrium iron garnet（YIG） thin films prepared by the sol-gel method and rapid thermal annealing（RTA） process for integrated inductor are investigated. The X-ray diffraction（XRD） results indicate that the YIG film annealed above 650 ℃ is poly-crystalline with single-phase garnet structure. Moreover, it can be found that the initial permeability μi, saturation magnetization MS and coercivity Hc of these YIG films increase with increasing RTA temperature. Low temperature annealing after crystallization can further improve the magnetic properties of YIG film. Thereby, a planar integrated inductor in the presence of Si substrate/SiO2 layer/Y2.8Bi0.2Fe5O12 thin film/Cu spiral coil structure is fabricated successfully by the standard IC processes. Due to the magnetic enhancement originated from YIG film, the inductance L and quality factor Q of the inductor with YIG film are improved in a certain frequency range.
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