Humidity sensing properties of Ce-doped nanoporous ZnO thin film prepared by sol-gel method
来源期刊：Journal of Rare Earths2012年第1期
论文作者：Mansoor Anbia Seyyed Ebrahim Moosavi Fard
文章页码：38 - 42
摘 要：The humidity sensitive characteristics of the sensor fabricated from Ce-doped nanoporous ZnO by screen-printing on the alumina substrate with Ag-Pd interdigital electrodes were investigated at different sintering temperatures.The nanoporous thin films were prepared by sol-gel technique.It was found that the impedance of the sensor sintered at 600 oC changed more than four order of magnitude in the relative humidity（RH） range of 11%-95% at 25 oC.The response and recovery time of the sensor were about 13 and 17 s,respectively.The sensor showed high humidity sensitivity,rapid response and recovery,prominent stability,good repeatability and narrow hysteresis loop.These re-sults indicated that Ce-doped nanoporous ZnO thin films can be used in fabricating high-performance humidity sensors.
Mansoor Anbia，Seyyed Ebrahim Moosavi Fard
Research Laboratory of Nanoporous Materials,Faculty of Chemistry,Iran University of Science and Technology,Farjam Street,Narmak,Tehran 16846,Iran
摘 要：The humidity sensitive characteristics of the sensor fabricated from Ce-doped nanoporous ZnO by screen-printing on the alumina substrate with Ag-Pd interdigital electrodes were investigated at different sintering temperatures.The nanoporous thin films were prepared by sol-gel technique.It was found that the impedance of the sensor sintered at 600 oC changed more than four order of magnitude in the relative humidity（RH） range of 11%-95% at 25 oC.The response and recovery time of the sensor were about 13 and 17 s,respectively.The sensor showed high humidity sensitivity,rapid response and recovery,prominent stability,good repeatability and narrow hysteresis loop.These re-sults indicated that Ce-doped nanoporous ZnO thin films can be used in fabricating high-performance humidity sensors.
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