Ceramic alloying with Ti-N deposition and diffusion of multi-layers by plasma surface alloying technique
来源期刊：中国有色金属学报(英文版)2005年第z3期
论文作者：刘燕萍 徐晋勇 隗晓云 王建忠 高原 徐重
文章页码：415 - 419
Key words：plasma glow discharge； hollow cathode effect； TiN； diffusion layer； wear resistance
Abstract: High quality TiN multi-layer was obtained on steel substrate by combined technology of plasma glow discharge sputtering, hollow cathode effect and interfacial diffusion. The TiN multi-layer consists of deposition layer and diffusion layer. Its morphology, structure and chemical compositions were analyzed. The microhardness and wear resistance were measured. The results indicate that the diffusion of Ti and N into the substrate leads to a strong interfacial adhesion. The thickness of TiN multi-layer is about 10μm. The strongest diffraction is on the (200) crystal plane of TiN. The surface hardness is about to 2300(HV_ 0.1). The wear resistance of the TiN ceramic alloying multi-layer is excellent and the friction coefficient is low under dry sliding conditions.
