Nitrogen Contents on Tribological Properties of Magnetron Sputtered SiCN Coatings
来源期刊：材料热处理学报2004年第5期
论文作者：J. WEI H. J. DU TIETUN SUN Y.Q. FU
关键词：SiCN coating; sputtering; morphology; hardness; wear; friction;
摘 要：Silicon carbonitride (SiCN) coatings were deposited on silicon and tungsten carbide substrates by co-sputtering silicon and carbon in argon and nitrogen mixture atmosphere using magnetron-sputtering system. The effect of the N2concentration, RF substrate bias voltage and target current on film deposition rate, roughness, adhesion, mechanical and tribological properties of coatings were investigated. The deposition rate was found to increase with the increasing nitrogen concentration. X-ray photoelectron spectroscopy analysis showed that high nitrogen concentration in the nitrogen-argon gas mixture enhanced the incorporation of C and N but reduced the incorporation of Si. SiCN coatings have good tribological properties at a N2 concentration of approximately 60%.
J. WEI1，H. J. DU2，TIETUN SUN3，Y.Q. FU2
(1.Singapore Institute of Manufacturing Technology, Singapore, 71 Nanyang Drive, Singapore 638075;
2.School of Mechanical and Production Engineering, Nanyang Technological University, Singapore 639798;
3.Department of physics, Shanghai Jiaotong University, Shanghai, China )
摘要:Silicon carbonitride (SiCN) coatings were deposited on silicon and tungsten carbide substrates by co-sputtering silicon and carbon in argon and nitrogen mixture atmosphere using magnetron-sputtering system. The effect of the N2concentration, RF substrate bias voltage and target current on film deposition rate, roughness, adhesion, mechanical and tribological properties of coatings were investigated. The deposition rate was found to increase with the increasing nitrogen concentration. X-ray photoelectron spectroscopy analysis showed that high nitrogen concentration in the nitrogen-argon gas mixture enhanced the incorporation of C and N but reduced the incorporation of Si. SiCN coatings have good tribological properties at a N2 concentration of approximately 60%.
关键词:SiCN coating; sputtering; morphology; hardness; wear; friction;
【全文内容正在添加中】
