EFFECT OF ANNEALING TREATMENT ON THE STRUCTURE OF CdS FILMS
来源期刊:Acta Metallurgica Sinica2003年第4期
论文作者:K.J.Liao G.B.Liu C.G.Hu L.H.Feng Q.Feng W.L.Wang
Key words:XPS; CdS thin film; CBD (chemical bath deposition);
Abstract: The effect of annealing treatment on the structure of CdS films was investigated.The cadmium sulfide thin films were prepared by chemical bath deposition, and were annealed at nitrogen atmosphere at different temperatures. The films were characterized by SEM and XPS (X-ray photoelectron spectroscopy). X-ray photoelectron spectroscopy was used to examine the chemical states on the CdS films surface. It was found that thermal annealing could produce large grains of CdS thin films, remove the air contamination and reduce the oxygen content on the CdS films surface. Therefore,the CdS films changed more uniform and smoother surface after thermal annealing.
K.J.Liao1,G.B.Liu1,C.G.Hu1,L.H.Feng2,Q.Feng1,W.L.Wang1
(1.Department of Applied Physics, Chongqing University, Chongqing 400044, China;
2.Department of Material Science, Sichuan University, Chengdu 610064, China;
3.Optoelectron Technology and System Laboratory of Education Ministry, Chongqing University, Chongqing 400044, China)
Abstract:The effect of annealing treatment on the structure of CdS films was investigated.The cadmium sulfide thin films were prepared by chemical bath deposition, and were annealed at nitrogen atmosphere at different temperatures. The films were characterized by SEM and XPS (X-ray photoelectron spectroscopy). X-ray photoelectron spectroscopy was used to examine the chemical states on the CdS films surface. It was found that thermal annealing could produce large grains of CdS thin films, remove the air contamination and reduce the oxygen content on the CdS films surface. Therefore,the CdS films changed more uniform and smoother surface after thermal annealing.
Key words:XPS; CdS thin film; CBD (chemical bath deposition);
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