Effect of Magnetic Field on the Deposition of Transparent Diamond-Like Carbon ( DLC ) Films by RF-PCVD
来源期刊：材料保护2004年增刊第2期
论文作者：HOU Hui-jun YUAN Zhen-hai DAI Da-huang LIN Song-sheng ZhU Xia-gao
关键词：diamond-like carbon; magnetic field; RF-PCVD; transparent;
摘 要：In order to deposit transparent and hard DLC films, magnetic field was introduced to enhance the plasma density of radiofrequency plasma chemical vapor deposition (RF-PCVD). In this paper, the configuration and computation of external magnetic field B are introduced. The restriction effect of magnetic field B on the charged particles and the effect of magnetic field B on the primary parameters-nonindependent power Pf and self-bias Uz were also studied. The mechanism of how magnetic field B affects self-bias Uz was analyzed.
HOU Hui-jun1，YUAN Zhen-hai1，DAI Da-huang1，LIN Song-sheng1，ZhU Xia-gao1
(1.Guangzhou Research Institute of Nonferrous Metals, Guangzhou 510651, China)
摘要:In order to deposit transparent and hard DLC films, magnetic field was introduced to enhance the plasma density of radiofrequency plasma chemical vapor deposition (RF-PCVD). In this paper, the configuration and computation of external magnetic field B are introduced. The restriction effect of magnetic field B on the charged particles and the effect of magnetic field B on the primary parameters-nonindependent power Pf and self-bias Uz were also studied. The mechanism of how magnetic field B affects self-bias Uz was analyzed.
关键词:diamond-like carbon; magnetic field; RF-PCVD; transparent;
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