Elastic modulus of TiN film investigated with Kroner model and X-ray diffraction
来源期刊:中国有色金属学报(英文版)2001年第1期
论文作者:张铭 孙海林 何家文
文章页码:63 - 66
Key words:elastic constants; fourpoint bending; X-ray diffraction; titanium nitride
Abstract: The four-point bending method was applied to measure X-ray elastic constants(XEC) of (422) and (331) planes of TiN coating. Elastic Modulus and XECs of all the crystal planes were calculated by Kroner method. The results from the calculation and the experiment were compared. It is concluded that the XECs values of same film prepared by different techniques scatter a little because of the effects of stoichiometric proportion and microstructure of films.