NITROGEN-OXYGEN COMPLEXES IN SILICON AND THEIR DONOR ACTION

来源期刊：中国有色金属学报(英文版)1999年第2期

论文作者：Liu Peidong Li Xiaojun

文章页码：355 - 361

Key words：nitrogen-oxygen complexes,　nitrogen-new donor　,CZ silicon

Abstract: The electronic characteristic of nitrogen-doped CZ silicon is completely different from that of nitrogen-doped FZ silicon and nitrogen-undoped CZ silicon. It has been found that nitrogen-doped CZ silicon can generate a kind of nitrogen related new donor which forms and disappears with the formation and disappearance of nitrogen-oxygen complexes respectively. The relationship between the formation and disappearance of nitrogen-new donor and annealing condition was studied, and the experimental results were discussed.