Histogram method for reliable thickness measurements of graphene films using atomic force microscopy(AFM)
来源期刊：JOURNAL OF MATERIALS SCIENCE TECHNOLOG2017年第8期
论文作者：Yaxuan Yao Lingling Ren Sitian Gao Shi Li
文章页码：815 - 820
摘 要：Atomic force microscopy(AFM) is a commonly used technique for graphene thickness measurement.However, due to surface roughness caused by graphene itself and variation introduced in AFM measurement, graphene thickness is difficult to be accurately determined by AFM. In this paper, a histogram method was used for reliable measurements of graphene thickness using AFM. The influences of various measurement parameters in AFM analysis were investigated. The experimental results indicate that significant deviation can be introduced using various order of flatten and improperly selected measurement parameters including amplitude setpoint and drive amplitude. At amplitude setpoint of 100 mV and drive amplitude of 100 m V, thickness of 1 layer(1L), 2 layers(2L) and 4 layers(4L) graphene were measured.The height differences for 1L, 2L and 4L were 1.51 ± 0.16 nm, 1.92 ± 0.13 nm and 2.73 ± 0.10 nm, respectively. By comparing these values, thickness of single layer graphene can be accurately determined to be0.41 ± 0.09 nm.
Yaxuan Yao，Lingling Ren，Sitian Gao，Shi Li
Division of Nano-Metrology and Materials Measurement, National Institute of Metrology
摘 要：Atomic force microscopy(AFM) is a commonly used technique for graphene thickness measurement.However, due to surface roughness caused by graphene itself and variation introduced in AFM measurement, graphene thickness is difficult to be accurately determined by AFM. In this paper, a histogram method was used for reliable measurements of graphene thickness using AFM. The influences of various measurement parameters in AFM analysis were investigated. The experimental results indicate that significant deviation can be introduced using various order of flatten and improperly selected measurement parameters including amplitude setpoint and drive amplitude. At amplitude setpoint of 100 mV and drive amplitude of 100 m V, thickness of 1 layer(1L), 2 layers(2L) and 4 layers(4L) graphene were measured.The height differences for 1L, 2L and 4L were 1.51 ± 0.16 nm, 1.92 ± 0.13 nm and 2.73 ± 0.10 nm, respectively. By comparing these values, thickness of single layer graphene can be accurately determined to be0.41 ± 0.09 nm.
关键词：
