Optical constants of Er2O3-Al2O3 films studied by spectroscopic ellipsometry
来源期刊：Journal of Rare Earths2011年第10期
论文作者：朱燕艳 方泽波 徐闰
文章页码：958 - 960
摘 要：Er2O3-Al2O3 film was deposited on the Si（001） substrate by radio frequency magnetron technique at room temperature.The samplewas annealed at 450,600 and 750 oC for 30 min in O2 ambience,respectively.The optical constants were studied by spectroscopic ellipsometryfor both the as-deposited and the annealed samples.The proper values of refractive index indicated that it could be a useful material for solar cells.
朱燕艳1，方泽波2，徐闰3
1. Department of Mathematics and Physics,Shanghai University of Electric Power2. Department of Physics,Shaoxing University3. School of Materials Science and Engineering,Shanghai University
摘 要：Er2O3-Al2O3 film was deposited on the Si（001） substrate by radio frequency magnetron technique at room temperature.The samplewas annealed at 450,600 and 750 oC for 30 min in O2 ambience,respectively.The optical constants were studied by spectroscopic ellipsometryfor both the as-deposited and the annealed samples.The proper values of refractive index indicated that it could be a useful material for solar cells.
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