Preparation of YBa2Cu3O7-x Superconductor Film by Ion Beam Sputtering
来源期刊：JOURNAL OF MATERIALS SCIENCE TECHNOLOG1989年第5期
论文作者：胡倾宇 闻立时 乔桂文 庄育智
文章页码：366 - 368
摘 要：<正> Since the discovery of high Tc super-conductor, much effort was made toits application. More and more evidencehas revealed that most promising fieldof high Tc superconductor first to havesuccess must be the microelectronics andcomputer. Superconductor films for mi-croelectronic application are preparedby PVD method, such as electron beamevaporation, pulsed laser evaporation andmagnetron sputtering. In this paper, thepreliminary results of ion beam sputteringdeposition of YBaCuO film are reported
胡倾宇，闻立时，乔桂文，庄育智
摘 要：<正> Since the discovery of high Tc super-conductor, much effort was made toits application. More and more evidencehas revealed that most promising fieldof high Tc superconductor first to havesuccess must be the microelectronics andcomputer. Superconductor films for mi-croelectronic application are preparedby PVD method, such as electron beamevaporation, pulsed laser evaporation andmagnetron sputtering. In this paper, thepreliminary results of ion beam sputteringdeposition of YBaCuO film are reported
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