Stabilization of cubic ordering of zirconium dioxide nanoclusters on silicon with laser ablation
来源期刊：Rare Metals2007年第S1期
论文作者：KUZ’MENKO A P PETERSON M B KUZ’MENKO N A ZAVODINSKY V G PUGACHEVSKY M A DOBROMYSLOV M B
文章页码：10 - 13
摘 要：Regimes of continuous and pulsed laser action on high-melting oxide compounds of ZrO2 were found with the aim of obtaining steady coatings on monocrystal silicon on laser ablation.X-ray phase analyses,scanning and atomic-force microscopy reveal that the coatings obtained are of nanocluster structure with the cubic ordering.In this case the nanoclusters reach several hundreds of nanometers in size.An assumption was made that on laser ablation of ZrO2 thermostabilization may take place where a minimum of the surface energy is attained just at cubic ordering.
KUZ’MENKO A P，PETERSON M B，KUZ’MENKO N A，ZAVODINSKY V G，PUGACHEVSKY M A，DOBROMYSLOV M B
摘 要：Regimes of continuous and pulsed laser action on high-melting oxide compounds of ZrO2 were found with the aim of obtaining steady coatings on monocrystal silicon on laser ablation.X-ray phase analyses,scanning and atomic-force microscopy reveal that the coatings obtained are of nanocluster structure with the cubic ordering.In this case the nanoclusters reach several hundreds of nanometers in size.An assumption was made that on laser ablation of ZrO2 thermostabilization may take place where a minimum of the surface energy is attained just at cubic ordering.
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