STUDY ON Ni-Cr SYSTEM SOLAR SELECTIVE THIN FILMS PREPARED BY MAGNETRON REACTIVE SPUTTERING PROCESS
来源期刊：Acta Metallurgica Sinica2002年第2期
论文作者：H.Shen B.W.Wang
Key words：solar selective thin film; magnetron reactive sputtering; absorp-tance; emittance;
Abstract: Ni-Cr System solar selective thin solid films were prepared by d.c. magnetron reactivesputtering under the atmosphere of O2 and N2. Ni-Cr alloy was chosen as targetmaterial and copper sheets as substrate. Using SEM, Spectrophotometer and Talystepto analyze the relations between the selective characteristic and the structure, theformation and the thickness of the thin films. The aim is to obtain good solar selectivethin films with high absorptance and low emittance, which is applied to flat plate solarheat collectors.
H.Shen1，B.W.Wang1
(1.Guangzhou Institute of Energy Conversion,The Chinese Academy of Sciences,Guangzhou 510070,China)
Abstract:Ni-Cr System solar selective thin solid films were prepared by d.c. magnetron reactivesputtering under the atmosphere of O2 and N2. Ni-Cr alloy was chosen as targetmaterial and copper sheets as substrate. Using SEM, Spectrophotometer and Talystepto analyze the relations between the selective characteristic and the structure, theformation and the thickness of the thin films. The aim is to obtain good solar selectivethin films with high absorptance and low emittance, which is applied to flat plate solarheat collectors.
Key words:solar selective thin film; magnetron reactive sputtering; absorp-tance; emittance;
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