Through-thickness texture gradient of tantalum sputtering target
来源期刊：Rare Metals2017年第6期
论文作者：Chao Deng Shi-Feng Liu Xiao-Bo Hao Jing-Li Ji Qing Liu Hai-Yang Fan
文章页码：523 - 526
摘 要：For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance.In this paper, through-thickness texture gradient of a rolled and subsequently annealed tantalum sputtering target was investigated. The results show that by carefully controlling the rolling process, shear-related components at the surface of the rolled sample could be avoided. Both the rolled sample and the annealed target develop a through-thickness texture gradient with the formation of a stronger {1 1 1}fiber in the center layer compared with that in the surface layer.
Chao Deng，Shi-Feng Liu，Xiao-Bo Hao，Jing-Li Ji，Qing Liu，Hai-Yang Fan
College of Materials Science and Engineering, Chongqing University
摘 要：For sputtering targets, through-thickness texture is critical for assuring reliable sputtering performance.In this paper, through-thickness texture gradient of a rolled and subsequently annealed tantalum sputtering target was investigated. The results show that by carefully controlling the rolling process, shear-related components at the surface of the rolled sample could be avoided. Both the rolled sample and the annealed target develop a through-thickness texture gradient with the formation of a stronger {1 1 1}fiber in the center layer compared with that in the surface layer.
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