Sputtering of W-Mo alloy under ion bombardment

来源期刊：中国有色金属学报(英文版)1999年第3期

论文作者：李成明 田林海 徐重 谢锡善 董建新

文章页码：629 - 633

Key words：metallic cementation; W-Mo alloy; preferential sputtering; ion bombardment

Abstract: The distribution of plasma density in the vicinity of the W-Mo alloy source in the process of double-glow discharge plasma surface alloying was diagnosed using the moveable Langmuir probe. The sputtering law, surface composition and morphological variation of the W-Mo alloy source was studied. The experimental results show that there exists obvious preferential sputtering on the surface of the W-Mo alloy source under the argon ion bombardment; the stable period is reached after a transitional period, and the preferential sputtering occurs in a definite range of composition(mole fraction): 70%~75%Mo, 22%~25%W; there appears segregation on the surface of the W-Mo alloy source.