Magnetron sputtered Dy2O3 with chromium and copper contents for antireflective thin films with enhanced absorption
来源期刊：JOURNAL OF RARE EARTHS2019年第9期
论文作者：Shahid M.Ramay Asif Mahmood Hamid M.Ghaithan Nasser S.Al-Zayed Adnan Aslam Abdullah Murtaza Nisar Ahmad Saadat A.Siddiqi Murtaza Saleem
文章页码：989 - 994
摘 要：Dy2O3 is a rare earth oxide having a number of advanced applications in various fields including protective or antireflective coatings, Main objective of this novel research work is to check the effect of Cr and Cu addition on different properties of Dy2O3 and achievement of antireflective thin films with enhanced abso rption. Thin films of these materials we re deposited using DC magnetron with reactive cosputtering. XRD studies reveals the crystalline nature of thin films having Dy2O3（222） reflection in all samples with Cr2O3（116） and CuO（111） reflections in Cr and Cu containing compositions. Field emission scanning electron microscopy demonstrates the homogeneous deposition of thin films with uniform shape, size and distribution of grains. Refractive index, extinction coefficient and absorption coefficient significantly increase while optical reflectance decreases with Cr and Cu mediation corroborating an improved antireflective mechanism. The imaginary part of dielectric constant is found to increase slightly with low tangent loss for Cr containing composition co nsidered favorable for energy storage applications.
Shahid M.Ramay，Asif Mahmood，Hamid M.Ghaithan，Nasser S.Al-Zayed，Adnan Aslam，Abdullah Murtaza，Nisar Ahmad，Saadat A.Siddiqi，Murtaza Saleem
摘 要：Dy2O3 is a rare earth oxide having a number of advanced applications in various fields including protective or antireflective coatings, Main objective of this novel research work is to check the effect of Cr and Cu addition on different properties of Dy2O3 and achievement of antireflective thin films with enhanced abso rption. Thin films of these materials we re deposited using DC magnetron with reactive cosputtering. XRD studies reveals the crystalline nature of thin films having Dy2O3（222） reflection in all samples with Cr2O3（116） and CuO（111） reflections in Cr and Cu containing compositions. Field emission scanning electron microscopy demonstrates the homogeneous deposition of thin films with uniform shape, size and distribution of grains. Refractive index, extinction coefficient and absorption coefficient significantly increase while optical reflectance decreases with Cr and Cu mediation corroborating an improved antireflective mechanism. The imaginary part of dielectric constant is found to increase slightly with low tangent loss for Cr containing composition co nsidered favorable for energy storage applications.
关键词：
