[Y（dbm）3（H2O）]:Synthesis, thermal behavior and spin-coating precursor for Y2O3 layer formation
来源期刊：JOURNAL OF RARE EARTHS2017年第12期
论文作者：Elaheh Pousaneh Andrea Preu? Khaybar Assim Julian Noll Alexander Jakob Tobias Rüffer Heinrich Lang
文章页码：1248 - 1254
摘 要：The synthesis,structure and thermal behavior of [Y（dbm）3（H2 O）]（3）（dbm = 1,3-diphenyl-1,3-propandionate） and its use as a spin-coating precursor for Y2 O3 deposition is reported. Complex 3 was prepared by the reaction of [Y（NO3）3·6 H2 O]（1） with 3 equiv of Hdbm（2） in presence of NaOH. The molecular structure of 3 in the solid-state was determined by single X-ray crystal diffraction. Both C1 symmetric crystallographically independent species of 3 possess a YO7 coordination setup with minor deviation from an ideal capped octahedron coordination geometry（∧ enantiomer）. Complex 3 forms a1 D chain, due to intermolecular hydrogen bonds between the coordinated H2 O molecule and the 0 atom of the dbm ligand, respectively. The thermal decomposition behavior of 3 was investigated by thermogravimetric studies in the temperature range of 40-800 ℃ and 40-1300 ℃ under an oxygen and argon atmosphere, respectively. Powder X-ray diffraction（PXRD） measurements of the residues confirmed the formation of Y2 O3. Complex 3 was applied as a spin-coating precursor for yttrium oxide film formation on either Si wafers with a continuous 100 nm thick SiO2 film, or with a native oxide layer.The as-deposited Y2 O3 layers are smooth, conformal, dense and transparent and are of a thickness of 27 and 30 nm, respectively.
Elaheh Pousaneh，Andrea Preu?，Khaybar Assim，Julian Noll，Alexander Jakob，Tobias Rüffer，Heinrich Lang
摘 要：The synthesis,structure and thermal behavior of [Y（dbm）3（H2 O）]（3）（dbm = 1,3-diphenyl-1,3-propandionate） and its use as a spin-coating precursor for Y2 O3 deposition is reported. Complex 3 was prepared by the reaction of [Y（NO3）3·6 H2 O]（1） with 3 equiv of Hdbm（2） in presence of NaOH. The molecular structure of 3 in the solid-state was determined by single X-ray crystal diffraction. Both C1 symmetric crystallographically independent species of 3 possess a YO7 coordination setup with minor deviation from an ideal capped octahedron coordination geometry（∧ enantiomer）. Complex 3 forms a1 D chain, due to intermolecular hydrogen bonds between the coordinated H2 O molecule and the 0 atom of the dbm ligand, respectively. The thermal decomposition behavior of 3 was investigated by thermogravimetric studies in the temperature range of 40-800 ℃ and 40-1300 ℃ under an oxygen and argon atmosphere, respectively. Powder X-ray diffraction（PXRD） measurements of the residues confirmed the formation of Y2 O3. Complex 3 was applied as a spin-coating precursor for yttrium oxide film formation on either Si wafers with a continuous 100 nm thick SiO2 film, or with a native oxide layer.The as-deposited Y2 O3 layers are smooth, conformal, dense and transparent and are of a thickness of 27 and 30 nm, respectively.
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