简介概要

Composition and structure of Ti-C/DLC graded composite films

来源期刊:中国有色金属学报(英文版)2002年第2期

论文作者:孙明仁 夏立芳

文章页码:246 - 250

Key words:gradient composite films; DLC films; composition; structure

Abstract: The Ti-CDLC gradient composite films were characterized systematically. The elemental depth profile and elemental chemical state evolution were determined by X-ray photoelectron spectroscopy (XPS). The transmission electron microscope (TEM) and high-resolution transmission electron microscopy (HRTEM) were used to study the structure of interfacial zone between DLC film and Ti-C layers. Results show that there are composition transition zone between DLC film and either Ti-C layer or steel substrate on condition that pre-deposited Ti layers on the steel substrate then plasma based bias deposited DLC films. In Ti-C graded layer, the chemical state of titanium and carbon are changed gradually. The structures of zone in Ti-C layer near the DLC film is consisted of random oriented nanocrystallines TiC dispersed in amorphous DLC matrix. The structure of the zone between DLC film and Ti-C graded layer is gradually changed too.

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