Hydrogen distribution in CVD diamond films prepared by DC arcjet operating at gas recycling mode

Hengda Zhang Changchun Sun Shude Yao Weizhong Tang and Fanxiu Materials Science and Engineering School, University of Science and Technology Beijing, Beijing 100083, China Institute of Heavy Ion Physics, Peking University, Beijing 100871, China

摘 要：<正>Hydrogen distribution and content in diamond films deposited by DC arcjet under gas recycling mode was evaluated by nuclear reaction analysis （NRA）. The films were characterized using scanning electron microscopy, X-ray diffraction and Raman spectrometry. The NRA results show that the hydrogen content in diamond films was approximately 0.6% （substrate temperature 770℃）, and strongly depended on the substrate temperature. It was that the hydrogen content increased with the increase of the substratetemperature. The possibility of hydrogen trapping in the films was also discussed.

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