Structural and mechanical properties of La1/3NbO3 and La1/3TaO3 thin films prepared by chemical solution deposition
来源期刊：Journal of Rare Earths2017年第11期
论文作者：Helena Brunckova Lubomir Medvecky Alexandra Kovalcikova Martin Fides Erika Mudra Juraj Durisin Martin Sebek
文章页码：1115 - 1125
摘 要：In this work, properties of perovskite lanthanum niobate La1/3NbO3（LN） and tantalate La1/3TaO3（LT）transparent thin films（200 nm thickness） prepared by chemical solution deposition on Pt/SiO2/Si substrates were described. The precursors and films were analyzed using FTIR and XPS spectra, XRD and SEM imaging. The both films after annealing at 1100 ℃ contained perovskite phase with a small fraction of pyrochlore LaNb5 O14（in LN）. The heterogeneous micro structure of LN film was composed from spherical or needle-like particles and homogeneous LT film that resulted in significant changes of their mechanical properties. The elastic modulus and hardness of these films were characterized for the first time by conventional and continuous stiffness（CSM） nanoindentation. The LT film modulus（E） and hardness（H） were higher（105.7 and 5.3 GPa） than LN（91.5 and 3.8 GPa）. The effect of microstructure on mechanical properties is significant. In addition, the average Derjaguin-Muller-Toporov（DMT）-based elastic modulus of LN film surface were estimated 50 GPa using AFM PeakForce QNM elastic mapping. The findings presented here can contribute to the fabrication of LN and LT films for the application to electrolytic thin film devices.
Helena Brunckova1，Lubomir Medvecky1，Alexandra Kovalcikova1，Martin Fides1，Erika Mudra1，Juraj Durisin1，Martin Sebek1
1. Institute of Materials Research, Slovak Academy of Sciences
摘 要：In this work, properties of perovskite lanthanum niobate La1/3NbO3（LN） and tantalate La1/3TaO3（LT）transparent thin films（200 nm thickness） prepared by chemical solution deposition on Pt/SiO2/Si substrates were described. The precursors and films were analyzed using FTIR and XPS spectra, XRD and SEM imaging. The both films after annealing at 1100 ℃ contained perovskite phase with a small fraction of pyrochlore LaNb5 O14（in LN）. The heterogeneous micro structure of LN film was composed from spherical or needle-like particles and homogeneous LT film that resulted in significant changes of their mechanical properties. The elastic modulus and hardness of these films were characterized for the first time by conventional and continuous stiffness（CSM） nanoindentation. The LT film modulus（E） and hardness（H） were higher（105.7 and 5.3 GPa） than LN（91.5 and 3.8 GPa）. The effect of microstructure on mechanical properties is significant. In addition, the average Derjaguin-Muller-Toporov（DMT）-based elastic modulus of LN film surface were estimated 50 GPa using AFM PeakForce QNM elastic mapping. The findings presented here can contribute to the fabrication of LN and LT films for the application to electrolytic thin film devices.
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