[Y(dbm)3(H2O)]:Synthesis, thermal behavior and spin-coating precursor for Y2O3 layer formation
来源期刊:Journal of Rare Earths2017年第12期
论文作者:Elaheh Pousaneh Andrea Preu? Khaybar Assim Julian Noll Alexander Jakob Tobias Rüffer Heinrich Lang
文章页码:1248 - 1254
摘 要:The synthesis,structure and thermal behavior of [Y(dbm)3(H2 O)](3)(dbm = 1,3-diphenyl-1,3-propandionate) and its use as a spin-coating precursor for Y2 O3 deposition is reported. Complex 3 was prepared by the reaction of [Y(NO3)3·6 H2 O](1) with 3 equiv of Hdbm(2) in presence of NaOH. The molecular structure of 3 in the solid-state was determined by single X-ray crystal diffraction. Both C1 symmetric crystallographically independent species of 3 possess a YO7 coordination setup with minor deviation from an ideal capped octahedron coordination geometry(∧ enantiomer). Complex 3 forms a1 D chain, due to intermolecular hydrogen bonds between the coordinated H2 O molecule and the 0 atom of the dbm ligand, respectively. The thermal decomposition behavior of 3 was investigated by thermogravimetric studies in the temperature range of 40-800 ℃ and 40-1300 ℃ under an oxygen and argon atmosphere, respectively. Powder X-ray diffraction(PXRD) measurements of the residues confirmed the formation of Y2 O3. Complex 3 was applied as a spin-coating precursor for yttrium oxide film formation on either Si wafers with a continuous 100 nm thick SiO2 film, or with a native oxide layer.The as-deposited Y2 O3 layers are smooth, conformal, dense and transparent and are of a thickness of 27 and 30 nm, respectively.
Elaheh Pousaneh,Andrea Preu?,Khaybar Assim,Julian Noll,Alexander Jakob,Tobias Rüffer,Heinrich Lang
摘 要:The synthesis,structure and thermal behavior of [Y(dbm)3(H2 O)](3)(dbm = 1,3-diphenyl-1,3-propandionate) and its use as a spin-coating precursor for Y2 O3 deposition is reported. Complex 3 was prepared by the reaction of [Y(NO3)3·6 H2 O](1) with 3 equiv of Hdbm(2) in presence of NaOH. The molecular structure of 3 in the solid-state was determined by single X-ray crystal diffraction. Both C1 symmetric crystallographically independent species of 3 possess a YO7 coordination setup with minor deviation from an ideal capped octahedron coordination geometry(∧ enantiomer). Complex 3 forms a1 D chain, due to intermolecular hydrogen bonds between the coordinated H2 O molecule and the 0 atom of the dbm ligand, respectively. The thermal decomposition behavior of 3 was investigated by thermogravimetric studies in the temperature range of 40-800 ℃ and 40-1300 ℃ under an oxygen and argon atmosphere, respectively. Powder X-ray diffraction(PXRD) measurements of the residues confirmed the formation of Y2 O3. Complex 3 was applied as a spin-coating precursor for yttrium oxide film formation on either Si wafers with a continuous 100 nm thick SiO2 film, or with a native oxide layer.The as-deposited Y2 O3 layers are smooth, conformal, dense and transparent and are of a thickness of 27 and 30 nm, respectively.
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