ENERGY DISTRIBUTION OF BACKSCATTERED ELECTRONS FROM HEAVY METALS
来源期刊：Acta Metallurgica Sinica2005年第3期
论文作者：Z.J.Ding Z.M.Zhang K. Salma
Key words：backscattered electrons; Monte Carlo; AES; heavy metal;
Abstract: The full energy distribution of backscattered electrons from the elastic peak down to the true-secondary electron peak for heavy metals, Ta, W, Pt and Au, in Auger electron spectroscopy in the EN(E) mode has been studied with a Monte Carlo simulation method, which includes cascade-secondary-electron production. The simulation model is based on the use of a dielectric function for describing inelastic scattering and secondary excitation, and on the use of Mott cross sections for elastic scattering. A systematic comparison between the calculated and experimental spectra measured with a cylindrical mirror analyzer has been made for primary energies ranging from 1 to 5keV. Excellent agreement was obtained for these heavy metals on the backscattering background at primary energies in the kev region. A significant contribution of cascade secondary electrons to the measured spectra on the low-energy side was found.
Z.J.Ding1，Z.M.Zhang1，K. Salma1
(1.Hefei National Laboratory for Physical Sciences at Microscale and Department of Physics,University of Science and Technology of China, Hefei 230026, China)
Abstract:The full energy distribution of backscattered electrons from the elastic peak down to the true-secondary electron peak for heavy metals, Ta, W, Pt and Au, in Auger electron spectroscopy in the EN(E) mode has been studied with a Monte Carlo simulation method, which includes cascade-secondary-electron production. The simulation model is based on the use of a dielectric function for describing inelastic scattering and secondary excitation, and on the use of Mott cross sections for elastic scattering. A systematic comparison between the calculated and experimental spectra measured with a cylindrical mirror analyzer has been made for primary energies ranging from 1 to 5keV. Excellent agreement was obtained for these heavy metals on the backscattering background at primary energies in the kev region. A significant contribution of cascade secondary electrons to the measured spectra on the low-energy side was found.
Key words:backscattered electrons; Monte Carlo; AES; heavy metal;
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