THEORY DEPOSITION MODEL AND INFLUENCING FACTORS DURING PROCESS OF PREPARING MICRO-LAYER LAMINATE BY EBPVD
来源期刊：Acta Metallurgica Sinica2004年第3期
论文作者：Y.Li L.P.Shi X.D.He
Key words：micro-layer composite material; EBPVD; residual gas pressure; evaporation method and speed; substrate temperature;
Abstract: This paper briefly introduces the characteristics of electron beam physical vapor deposition (EBPVD) technique and the whole process of preparing micro-layer composite laminate. And several major influencing factors are presented and discussed. It was found that residual gas pressure should be low enough to guarantee the unobstructed transportation of vapor steam and electron beam; the evaporation method and evaporation speed are up to the different vapor pressure deficit of compositions of raw materials; and the substrate temperature could have great influence on the microstructure of the micro-layer laminates.
Y.Li1，L.P.Shi1，X.D.He1
(1.Center for Composite Materials, Harbin Institute of Technology, Harbin 150001, China)
Abstract:This paper briefly introduces the characteristics of electron beam physical vapor deposition (EBPVD) technique and the whole process of preparing micro-layer composite laminate. And several major influencing factors are presented and discussed. It was found that residual gas pressure should be low enough to guarantee the unobstructed transportation of vapor steam and electron beam; the evaporation method and evaporation speed are up to the different vapor pressure deficit of compositions of raw materials; and the substrate temperature could have great influence on the microstructure of the micro-layer laminates.
Key words:micro-layer composite material; EBPVD; residual gas pressure; evaporation method and speed; substrate temperature;
【全文内容正在添加中】
