Effect of TiO2 Seed Layer on 0.7Pb(Mg0.33Nb0.67)O3-0.3PbTiO3 Thin Films Deposited by Radio Frequency Magnetron Sputtering
来源期刊：Journal Of Wuhan University Of Technology Materials Science Edition2009年第S1期
论文作者：王俊明 费维栋
文章页码：17 - 19
摘 要：We have grown PbMg1/3Nb2/3O3-PbTiO3（PMN-PT） thin films by radio frequency（RF） sputtering deposition at 550 ℃-650 ℃ on Pt/Ti/SiO2/Si and TiO2/Pt/Ti/SiO2/Si substrates.The phase compositions and microstructure of thin films were characterized by X-ray diffraction（XRD） and scanning electric microstructure（SEM）.The effect of the TiO2 seed layer on PMN-PT films was studied.
王俊明，费维栋
School of Materials Science & Engineering,Harbin Institute of Technology
摘 要：We have grown PbMg1/3Nb2/3O3-PbTiO3（PMN-PT） thin films by radio frequency（RF） sputtering deposition at 550 ℃-650 ℃ on Pt/Ti/SiO2/Si and TiO2/Pt/Ti/SiO2/Si substrates.The phase compositions and microstructure of thin films were characterized by X-ray diffraction（XRD） and scanning electric microstructure（SEM）.The effect of the TiO2 seed layer on PMN-PT films was studied.
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