Ni-Cr-Mo-Nb合金的阴极溅射行为

来源期刊：中国有色金属学报2001年第2期

论文作者：张旭 谢锡善 董建新 徐重 张通和

文章页码：179 - 182

关键词：双层辉光； 阴极溅射； 镍基合金

Key words：double glow; cathode sputtering; nickel base alloy

摘    要：研究了双层辉光放电条件下镍基合金Inconel 625的阴极溅射行为。结果表明：多组元镍基合金由于各组元溅射率不同，产生择优溅射现象。Mo，Nb等低溅射率元素在阴极表面富集，Ni，Cr等高溅射率元素在阴极表面贫化，使阴极表面发生相变，形成含Mo，Nb较高的金属间化合物析出相 P 相和Laves相。随着阴极溅射电压的增加，阴极合金元素溅射率增加；并且随着阴极温度升高，阴极溅射率也随之增加。

Abstract: The cathode sputtering of nickel base alloy Inconel 625 was studied in double glow discharge. The results show that the preferential sputtering effect is happened in Ni-Cr-Mo-Nb alloy as the deference of element sputtering rates. The content of lower sputtering rate elements Mo and Nb increases while the higher sputtering rate elements Ni and Cr decrease in the surface layer， and the intermetallic phases P and Laves containing high concentration of Mo and Nb precipitate in surface layer. The sputtering rate increases with the increase of the cathode voltage and the temperature.