SPIN-DEPENDENT TUNNELING MAGNETORESISTANCE IN Fe-O/AlOx/Fe-O FILMS
来源期刊：Acta Metallurgica Sinica2002年第2期
论文作者：S.Luo P.Wu L.Q.Pan Y.Tian H.Qiu F.P.Wang
Key words：spin-dependent tunneling. magnetoresistance. magnetic thin film;
Abstract: Fe-O/AlOx/Fe-O tunnel junctions were prepared by reactive magnetron sputteringunder mixed working gas Ar+2%O2. The insulating AlOx layer of 1-2nm thicknesswas sputtered directly from Al2O3 target. Electrode layers were made of 80at.% ironand 20at.% oxygen. Bottom Fe-O electrode deposited on glass substrate annealedat 473K at the pressure of 3× 10-4Pa for an hour shows disparate crystalline grainstructure, lower electrical resistance and coercivity compared to the as-deposited topelectrode. Only crystalline structrure of α-Fe is observed in both electrodes. Largetunnel magnetoresistance in large Fe-O/AlOx/Fe-O junctions of 1cm2 is observed atroom temperature and the Ⅰ-Ⅴ characteristic curve of the junction shows that thebarrier of the junction is of high quality.
S.Luo1，P.Wu1，L.Q.Pan1，Y.Tian1，H.Qiu1，F.P.Wang1
(1.Beijing Keda-Tianyu Microelectronic Materials Technology Development Co. Ltd.,Rm105 Keji Building,30 Xueyuan Rd. Haidian District,Beijing 100083,China)
Abstract:Fe-O/AlOx/Fe-O tunnel junctions were prepared by reactive magnetron sputteringunder mixed working gas Ar+2%O2. The insulating AlOx layer of 1-2nm thicknesswas sputtered directly from Al2O3 target. Electrode layers were made of 80at.% ironand 20at.% oxygen. Bottom Fe-O electrode deposited on glass substrate annealedat 473K at the pressure of 3× 10-4Pa for an hour shows disparate crystalline grainstructure, lower electrical resistance and coercivity compared to the as-deposited topelectrode. Only crystalline structrure of α-Fe is observed in both electrodes. Largetunnel magnetoresistance in large Fe-O/AlOx/Fe-O junctions of 1cm2 is observed atroom temperature and the Ⅰ-Ⅴ characteristic curve of the junction shows that thebarrier of the junction is of high quality.
Key words:spin-dependent tunneling. magnetoresistance. magnetic thin film;
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