ZnO Films on Transferable and Low Thermal Resistance Graphite Substrate Grown by Ultrasonic Spray Pyrolysis
来源期刊：Journal Of Wuhan University Of Technology Materials Science Edition2014年第3期
论文作者：边继明 MA Xiaowen SUN Jingchang ZHANG Zhikun WANG Yuxin QIN Fuwen LUO Yingmin ZHANG Yuzhi FU Xianping
文章页码：428 - 432
摘 要：ZnO thin films were deposited on graphite substrates by ultrasonic spray pyrolysis method with Zn（CH 3 COO） 2 ·2H 2 O aqueous solution as precursor. The crystalline structure, morphology, and optical properties of the as-grown ZnO films were investigated systematically as a function of deposition temperature and growth time. Near-band edge ultraviolet（UV） emission was observed in room temperature photoluminescence spectra for the optimized samples, yet the usually observed defect related deep level emissions were nearly undetectable, indicating that high optical quality ZnO thin fi lms could be achieved via this ultrasonic spray pyrolysis method. Considering the features of transferable and low thermal resistance of the graphite substrates, the achievement will be of special interest for the development of high-power semiconductor devices with suffi cient power durability.
边继明1,2，MA Xiaowen1，SUN Jingchang3，ZHANG Zhikun1，WANG Yuxin3，QIN Fuwen1，LUO Yingmin1，ZHANG Yuzhi2，FU Xianping4
1. School of Physics and Optoelectronic Technology, Dalian University of Technology2. Key Laboratory of Inorganic Coating Materials,Chinese Academy of Sciences3. School of Physics and Electronic Technology, Liaoning Normal University4. Information Science & Technology College, Dalian Maritime University
摘 要：ZnO thin films were deposited on graphite substrates by ultrasonic spray pyrolysis method with Zn（CH 3 COO） 2 ·2H 2 O aqueous solution as precursor. The crystalline structure, morphology, and optical properties of the as-grown ZnO films were investigated systematically as a function of deposition temperature and growth time. Near-band edge ultraviolet（UV） emission was observed in room temperature photoluminescence spectra for the optimized samples, yet the usually observed defect related deep level emissions were nearly undetectable, indicating that high optical quality ZnO thin fi lms could be achieved via this ultrasonic spray pyrolysis method. Considering the features of transferable and low thermal resistance of the graphite substrates, the achievement will be of special interest for the development of high-power semiconductor devices with suffi cient power durability.
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