Field Emission Properties of Nano-DLC Films Prepared on Cu Substrates by Pulsed Laser Deposition
来源期刊：Journal Of Wuhan University Of Technology Materials Science Edition2018年第2期
论文作者：彭丽萍 LI Xiangkun FAN Long WANG Xuemin 吴卫东
文章页码：326 - 330
摘 要：Nano-diamond like carbon（DLC） thin films were prepared on fused silica and Cu substrates by the pulsed-laser deposition technique with different laser intensities. Step-measurement, atomic force microscope（AFM）, UV-VIS-NIR transmittance spectroscopy and Raman spectroscopy were used to characterize the films. It was shown that the deposition rate increases with the laser intensity, and the films prepared under different laser intensities show different transparency. Raman measurement showed that the content of sp3 of the Nano-DLC thin films decreases with the laser intensity. The field emission properties of the Nano-DLC thin films on Cu substrates were studied by the conventional diode method, which showed that the turn-on field increases and the current density decreases with sp3 content in the films. A lower turn-on field of 6 V/um and a higher current density of 1 uA/cm2 were obtained for Nano-DLC thin films on Cu substrate.
彭丽萍1，LI Xiangkun2，FAN Long1，WANG Xuemin1，吴卫东1
1. Science and Technology on Plasma Physics Laboratory,Research Center of Laser Fusion,CAEP2. Institute of Applied Electronics,CAEP
摘 要：Nano-diamond like carbon（DLC） thin films were prepared on fused silica and Cu substrates by the pulsed-laser deposition technique with different laser intensities. Step-measurement, atomic force microscope（AFM）, UV-VIS-NIR transmittance spectroscopy and Raman spectroscopy were used to characterize the films. It was shown that the deposition rate increases with the laser intensity, and the films prepared under different laser intensities show different transparency. Raman measurement showed that the content of sp3 of the Nano-DLC thin films decreases with the laser intensity. The field emission properties of the Nano-DLC thin films on Cu substrates were studied by the conventional diode method, which showed that the turn-on field increases and the current density decreases with sp3 content in the films. A lower turn-on field of 6 V/um and a higher current density of 1 uA/cm2 were obtained for Nano-DLC thin films on Cu substrate.
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