Phase structure of sputtered Ta coating and its ablation behavior by laser pulse heating（LPH）

Yunsong Niu¹，Lingling Xing²，Feng Yang³，Huawei Li²，Minghui Chen⁴，Shenglong Zhu¹，Fuhui Wang⁴

1. Corrosion and Protection Division, Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences2. College of Chemistry and Chemical Engineering, Shenyang Normal University3. School of Equipment Engineering, Shenyang Ligong University4. Corrosion and Protection Division, Shenyang National Laboratory for Materials Science, Northeastern University

摘 要：Phase structure of sputtered Ta coating in the negative glow space and LPH effect were explored.The whole coating/substrate system is substrate→physically gas-absorbed Fe surface→oxygen-enriched TaOx layer→amorphous Ta→α and β dual phase→ single α phase.After LPH course,micro structure of Ta coating shows intact,only a few cracks emerge after 100 laser pulses,exhibiting thin HAZ but thick Fe/Ta ICZ,without martensitic transformation.For the electrodeposited Cr coating,continuous thermal stresses produce many extra micro-crack,substrate oxidation and martensitic transformation,leading to crack propagations and final bulk delamination,without any ICZ.

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