STUDY ON COMPOSITION, MICROSTRUCTURE AND HARDNESS OF DLC FILMS BY VCAD
来源期刊：Acta Metallurgica Sinica2003年第4期
论文作者：S.S.Lin Z.H.Yuan H.J.Hou L.Chen Z.Y.Liu W.Q.Qiu D.C.Zeng
Key words：DLC films; vacuum cathode arc deposition; micro-hardness;
Abstract: DLC super-hard films have been deposited on the substrates of single crystalline Si, pure Ti and stainless steel 18-8 by a method of vacuum cathode arc deposition(VCAD). The composition, microstructure and micro-hardness of the films have been studied in this paper. The results indicate that hardness of the DLC films is different on the different substrates. Hardness of the films increases with decreasing in surface roughness of the films. The maximum value of micro-hardness belongs to the DLC films deposited under the hydrogen pressure of 0.35Pa and the negative bias of 100V.
S.S.Lin1，Z.H.Yuan1，H.J.Hou1，L.Chen2，Z.Y.Liu2，W.Q.Qiu2，D.C.Zeng2
(1.Guangzhou Research Institute of Non-Ferrous Metals, Guangzhou 510651, Chiua;
2.Institute of Materials Science & Technology, College of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China)
Abstract:DLC super-hard films have been deposited on the substrates of single crystalline Si, pure Ti and stainless steel 18-8 by a method of vacuum cathode arc deposition(VCAD). The composition, microstructure and micro-hardness of the films have been studied in this paper. The results indicate that hardness of the DLC films is different on the different substrates. Hardness of the films increases with decreasing in surface roughness of the films. The maximum value of micro-hardness belongs to the DLC films deposited under the hydrogen pressure of 0.35Pa and the negative bias of 100V.
Key words:DLC films; vacuum cathode arc deposition; micro-hardness;
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