Local segregation in Cu-In precursors and its effects on microstructures of selenized CuInSe₂thin films^①

来源期刊：中南大学学报(英文版)2005年第1期

论文作者：方玲 张弓 庄大明 赵明 吴敏生

文章页码：13 - 16

Key words：solar cell; Cu-In precursor; CuInSe₂ thin film; selenization; magnetron sputtering

Abstract: Local segregation in Cu-In precursors and its effects on the element distribution and microstructures of selenized CuInSe₂thin films were investigated. Cu-In precursors with an ideal total mole ratio of Cu to In of 0.92 were prepared by middle frequency alternating current magnetron sputtering with Cu-In alloy target, then CuInSe₂ absorbers for solar cells were formed by selenization process in selenium atmosphere. Scanning electron microscope and energy dispersive X-ray spectroscope were used respectively to observe the surface morphologies and determine the compositions of both Cu-In precursors and CuInSe₂ thin films. Their microstructures were characterized by X-ray diffractometry and Raman spectroscope. The results show that Cu-In precursors are mainly composed of Cu₁₁In₉ phase with In-rich solid solution. Stoichiometric CuInSe₂ thin films with a homogeneous element distribution and single chalcopyrite phase can be synthesized from a segregated Cu-In precursor film with an ideal total mole ratio of Cu to In of 0.92. CuInSe₂ thin film shows P-type conductivity and its resistivity reaches 1.2×10³Ω·cm.