Epitaxial growth of MOCVD-derived YBCO films by modulation of Cu（tmhd）2 concentration
来源期刊：Rare Metals2014年第1期
论文作者：Jie Xiong Fei Zhang Xin Liu Rui-Peng Zhao Xiao-Hui Zhao Bo-Wan Tao
文章页码：70 - 74
摘 要：Metal–organic chemical vapor deposition was applied to fabricate YBa2 Cu3 O7-d（YBCO） films on singlecrystal LaAlO3（001） substrates for its high deposition rate, easy adjustment on film composition, and low requirement on vacuum apparatus. The effects of Cu（tmhd）2 concentration in the precursor on the properties of YBCO films were systematically investigated. X-ray diffraction（XRD） reveals that the mole ratio of Cu/Ba in the precursor from 0.77 to 0.97 is helpful to improve the crystallization and out-of-plane orientation of YBCO films; however, it hardly affects the inplane texture. Scanning electron microscope（SEM） shows the dense, crack-free but rough surface, on which there are Cu–O and Ba–Cu–O outgrowths identified by energy-dispersive spectrometer（EDS）. As the mole ratio of Cu/Ba increasing, the average size of Ba–Cu–O precipitates keeps increasing and the film composition becomes inhomogeneous at the mole ratio of Cu/Ba of 0.97. The 250 nm thick YBCO film prepared at the mole ratio of Cu/Ba of 0.91 shows the critical current density（Jc） of 4.0 MA cm-2（77 K, 0 T）.
Jie Xiong1,2，Fei Zhang1,2，Xin Liu1,2，Rui-Peng Zhao1,2，Xiao-Hui Zhao1,2，Bo-Wan Tao1,2
1. School of Microelectronics and Solid-State Electronics, University of Electronic Science and Technology of China2. State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronic Science and Technology of China
摘 要：Metal–organic chemical vapor deposition was applied to fabricate YBa2 Cu3 O7-d（YBCO） films on singlecrystal LaAlO3（001） substrates for its high deposition rate, easy adjustment on film composition, and low requirement on vacuum apparatus. The effects of Cu（tmhd）2 concentration in the precursor on the properties of YBCO films were systematically investigated. X-ray diffraction（XRD） reveals that the mole ratio of Cu/Ba in the precursor from 0.77 to 0.97 is helpful to improve the crystallization and out-of-plane orientation of YBCO films; however, it hardly affects the inplane texture. Scanning electron microscope（SEM） shows the dense, crack-free but rough surface, on which there are Cu–O and Ba–Cu–O outgrowths identified by energy-dispersive spectrometer（EDS）. As the mole ratio of Cu/Ba increasing, the average size of Ba–Cu–O precipitates keeps increasing and the film composition becomes inhomogeneous at the mole ratio of Cu/Ba of 0.97. The 250 nm thick YBCO film prepared at the mole ratio of Cu/Ba of 0.91 shows the critical current density（Jc） of 4.0 MA cm-2（77 K, 0 T）.
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