THE PREPARATION AND CHARACTERISTICS STUDY OF TiNxOy SPECTRAL SELECTIVE ABSORBING FILM BY MAGNETRON SPUTIERING
来源期刊：Acta Metallurgica Sinica2005年第3期
论文作者：D.Chen B.W.Wang H.Shen H.Q. Wang
Key words：spectrum selecting absorbent film; TiNxOy; magnetron sputtering;
Abstract: Spectral selective absorbent film is a crucial factor for the solar heating device. There are many kinds of spectral selective absorbing film made by different ways. TiNxOy thin film with excellent spectral selecting absobent property were successfully prepared by DC magnetron sputtering with Ar as working gas, N2 and O2 as reactive gas, 99.9% titanium as the target and is copper slice as the substrate. In this article, the optical characteristics and microstructure of TiNxOy thin film were studied, Inputing O2 can decrease the reflection of the visible lights, and double layer film can get good absorption for solar energy.
D.Chen1，B.W.Wang2，H.Shen3，H.Q. Wang4
(1.Material and Science Engineering Institute, South China University of Technology,Guangzhou 510641, China;
2.Guangzhou Institute of Energy Conversion, The Chinese Academy of Sciences, Guangzhou 510640, China;
3.Energy Engineering Institute, Zhongshan University, Guangzhou 510275, China;
4.School of Mechanism and Automobile, Shenyang Institute of Aeronantical Engineering, Shenyang 110034,China)
Abstract:Spectral selective absorbent film is a crucial factor for the solar heating device. There are many kinds of spectral selective absorbing film made by different ways. TiNxOy thin film with excellent spectral selecting absobent property were successfully prepared by DC magnetron sputtering with Ar as working gas, N2 and O2 as reactive gas, 99.9% titanium as the target and is copper slice as the substrate. In this article, the optical characteristics and microstructure of TiNxOy thin film were studied, Inputing O2 can decrease the reflection of the visible lights, and double layer film can get good absorption for solar energy.
Key words:spectrum selecting absorbent film; TiNxOy; magnetron sputtering;
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