Preparation of DyPt2 Films by Using Magneto Controlled Sputtering and Phase Transformation of Dy/Pt Alloy Films
来源期刊：JOURNAL OF RARE EARTHS2007年增刊第1期
论文作者：Gu Zhengfei Wang Yuanliang Cheng Gang Zhang Huaiying Zhao Jiacheng
Key words：Dy/Pt thin film; microstructure; heat treatment; X-ray techniques; rare earths;
Abstract: DyPt2 films were prepared by alternate deposition thin Dy and Pt layers on glass substrates by DC magneto controlled sputtering method. The XRD data indicated that for as-deposited Dy/Pt films, and the periodic layered structures along thickness direction were evidenced with low angle X-ray scattering. With increasing annealing temperature, the compounds of DyPt, DyPt2 and DyPt3 were formed successively at temperature ranging from 300 to 400℃. It was found that the composition reaction DyPt + DyPt3→2DyPt2 took place at 500℃. After annealing at 500℃ for 1h, the compounds DyPt and DyPt3 transformed completely into the DyPt2 compound.
Gu Zhengfei1，Wang Yuanliang1，Cheng Gang1，Zhang Huaiying1，Zhao Jiacheng1
(1.Department of Materials Science and Engineering, Guilin University of Electronic Technology, Guilin 541004, China)
Abstract:DyPt2 films were prepared by alternate deposition thin Dy and Pt layers on glass substrates by DC magneto controlled sputtering method. The XRD data indicated that for as-deposited Dy/Pt films, and the periodic layered structures along thickness direction were evidenced with low angle X-ray scattering. With increasing annealing temperature, the compounds of DyPt, DyPt2 and DyPt3 were formed successively at temperature ranging from 300 to 400℃. It was found that the composition reaction DyPt + DyPt3→2DyPt2 took place at 500℃. After annealing at 500℃ for 1h, the compounds DyPt and DyPt3 transformed completely into the DyPt2 compound.
Key words:Dy/Pt thin film; microstructure; heat treatment; X-ray techniques; rare earths;
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