简介概要

Investigation of Crystallization Incorporation of Er-implanted Silicon

来源期刊：Journal of Rare Earths1995年第2期

论文作者：万亚李岱青章蓓陈孔军朱沛然徐天冰

摘要：ＩｎｖｅｓｔｉｇａｔｉｏｎｏｆＣｒｙｓｔａｌｌｉｚａｔｉｏｎＩｎｃｏｒｐｏｒａｔｉｏｎｏｆＥｒ－ｉｍｐｌａｎｔｅｄＳｉｌｉｃｏｎＷａｎＹａ（万亚）；ＬｉＤａｉｑｉｎｇ（李岱青）（ＤｅｐａｒｔｍｅｎｔｏｆＣｈｅｍｉｓｔｒｙ，ＹａｎｔａｉＴｅａｃｈｅｒｓ...

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Investigation of Crystallization Incorporation of Er-implanted Silicon

万亚，李岱青，章蓓，陈孔军，朱沛然，徐天冰

摘要：ＩｎｖｅｓｔｉｇａｔｉｏｎｏｆＣｒｙｓｔａｌｌｉｚａｔｉｏｎＩｎｃｏｒｐｏｒａｔｉｏｎｏｆＥｒ－ｉｍｐｌａｎｔｅｄＳｉｌｉｃｏｎＷａｎＹａ（万亚）；ＬｉＤａｉｑｉｎｇ（李岱青）（ＤｅｐａｒｔｍｅｎｔｏｆＣｈｅｍｉｓｔｒｙ，ＹａｎｔａｉＴｅａｃｈｅｒｓ...

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